The J1...J3 method for linear readout of dynamic phase change in a flextensional piezoelectric actuator
نویسندگان
چکیده
A new improved version of the J1...J4 interferometric method for optical phase measurements, named J1...J3 method, is described, which is of easier implementation and is more stable to phase drift than the original one. This new spectrum technique is used to characterize a flextensional piezoelectric actuator by measuring its nanometric displacement amplitudes.
منابع مشابه
Interferometric Measurements of Nanometric Displacements in a Piezoelectric Flextensional Actuator by Using the New J1...J5 Method
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